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Quartz Wafer
Fused Silica
       Fused quartz or fused silica is glass consisting of silica in amorphous (non-crystalline) form. It differs from traditional glasses in containing no other ingredients, which are typically added to glass to lower the melt temperature. Fused silica, therefore, has high working and melting temperatures. 
Product Detail
Diameter 2" 3" 4" 5" 6" 8"
Thickness (um) Depends on Request
Material Fused Silica
Grade/Brand JGS2/JGS1/JGS3
Surface Finished DSP/SSP
TTV (um) <8 <10 <10 <10 <15 <20
Bow/Warp (um) <30 <30 <40 <40 <60 <60
Ra (nm) <1
S/D (um) 40/20


Fused Silica
Mechanical Units of Measure SI/Metric (Imperial)
Density gm/cc (lb/ft3) 2.2 -137.4
Porosity % (%) 0 0
Color clear
Flexural Strength MPa (lb/in2x103)
Elastic Modulus GPa (lb/in2x106) 73 -10.6
Shear Modulus GPa (lb/in2x106) 31 -4.5
Bulk Modulus GPa (lb/in2x106) 41 -6
Poisson’s Ratio 0.17 -0.17
Compressive Strength MPa (lb/in2x103) 1108 -160.7
Hardness Kg/mm2 600
Fracture Toughness KIC MPa•m1/2
Maximum Use Temperature (no load) °C (°F) 1100 -2000
       
Thermal      
Thermal Conductivity W/m•°K (BTU•in/ft2•hr•°F) 1.38 -9.6
Coefficient of Thermal Expansion 10–6/°C (10–6/°F) 0.55 -0.31
Specific Heat J/Kg•°K (Btu/lb•°F) 740 -0.18
Electrical      
Dielectric Strength ac-kv/mm (volts/mil) 30 -750
Dielectric Constant @ 1 MHz 3.82 -3.82
Dissipation Factor @ 1 MHz 0.00002 -0.00002
Loss Tangent @ 1 MHz
Volume Resistivity ohm•cm >1010

       Fused quartz or fused silica is glass consisting of silica in amorphous (non-crystalline) form. It differs from traditional glasses in containing no other ingredients, which are typically added to glass to lower the melt temperature. Fused silica, therefore, has high working and melting temperatures. Although the terms fused quartz and fused silica are used interchangeably, the optical and thermal properties of fused silica are superior to those of fused quartz and other types of glass due to its purity. For these reasons, it finds use in situations such as semiconductor fabrication and laboratory equipment. It transmits ultraviolet better than other glasses, so is used to make lenses and optics for the ultraviolet spectrum. The low coefficient of thermal expansion of fused quartz makes it a useful material for precision mirror substrates.
 
Sub 1: PlutoChip Co., Ltd    -Discrete Devices and Integrated Circuits-    www.plutochip.com
Sub 2: PlutoSilica Co., Ltd   -Silicon Wafer and Glass Wafer Manufactory-
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