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Foundry
MEMS Process
Lithography
Coating
Etching
Bonding
PI
PDMS
TSV
Mask
Ion Implantation
other
Equipment
Equipment
MEMS Product
Thermopile
Process Nod-1.5um
Process Nod-100nm
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Sub 1: PlutoChip Co., Ltd -Discrete Devices and Integrated Circuits-
www.plutochip.com
Sub 2: PlutoSilica Co., Ltd -Silicon Wafer and Glass Wafer Manufactory-
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