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Photolithography Process
Stepper Lithography Machine
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Product Detail

Stepper Lithography Machine

Model: Nikon I9
Manufacturer: Nikon, Japan
Main Function: High-precision lithography
Technical Specifications: Lithography accuracy: 500nm
Alignment accuracy: 150nm
Maximum exposure area: 2cm × 2cm
Wafer Size: Automatic loading can handle 6-inch silicon wafers, manual loading can handle a minimum of 1/4 of a 2-inch wafer
 
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