Electron Beam Evaporation Coating Machine
Model: Ohmiker-50B
Manufacturer: Chung Wen Technology Co., Ltd., Taiwan
Main Function: Preparation of metal films, an essential process in the fabrication of all optoelectronic devices. Commonly used for preparing metal electrodes, contact layers, and various electrical and optical metal films.
Technical Specifications: The coating rate of this equipment is adjustable from 0 to 1 Å/s, film thickness uniformity between wafers ±5%, inter-chamber uniformity ±5%, for every 100nm of gold film deposited, gold consumption ≤ 2 grams. Operating vacuum < 2 × 10⁻⁶.
