60B Electron Beam Evaporation Coating Machine
Model: Fu-12PEB
Manufacturer: Fulian Technology Engineering Co., Ltd.
Main Function: Preparation of high-quality, high-precision, and highly directional metal films, mainly used for lift-off processes.
Technical Specifications: Sample size 6-inch wafers downward compatible;
Coating rate adjustable from 0~20A/s, minimum precision 0.1A/s;
4-inch wafers, aluminum film deposition, intra-wafer non-uniformity ≤3%
