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Etching Process
Multi-functional Reactive Ion Etching Machine
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Product Detail

Multi-functional Reactive Ion Etching Machine  

Model: MERIE-3A  
Manufacturer: Microelectronics Center, Chinese Academy of Sciences  
Main Function: Etching of graphene, metals, two-dimensional materials, etc.  
Technical Specifications: Multi-functional reactive ion etching machine | ME-3A, compatible with etching of four inches and below, using O2/Ar/CHF3/SF6.
 
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