Spectral Ellipsometer
Model: RC2 XI
Manufacturer: J.A.WOOLLAM, USA
Main Function: 1) Optical constant analysis of various optoelectronic materials, including metals, semiconductors, superconductors, insulators, amorphous materials, magnetic materials, optoelectronic materials, nonlinear materials, isotropic and anisotropic materials, etc.
2) Thickness and roughness analysis of thin film materials.
Technical Specifications: Spectral range: 200-2500nm; Test interval: 1nm@210-1000nm, 6nm@1000-2500nm; Micro spot diameter: 150μm;
Incident angle: 45-90°, angle repeatability better than 0.02°, automatic sample stage, automatic tilt.
Thickness repeatability better than 0.005nm (scale deviation of 30 measurements of 25nm thermal oxide SiO2 thickness).
