Packaging testing equipment
Product Detail
Probe Surface Step Tester
Model: DektakXT
Manufacturer: Bruker, Germany
Main Function: Two-dimensional surface profile measurement / optional three-dimensional measurement
Technical Specifications: Sample view can select magnification, 1 to 4mm FOV
Probe pressure using LIS 3 sensor: 1 to 15mg
Sample X/Y stage manual X-Y translation: 100mm (4 inches); scanning length range 55mm (2 inches) maximum sample thickness 50mm (2 inches); maximum wafer size 200mm (8 inches);
Step height reproducibility < 5Å, 1 σ on 0.1μm step;
Vertical range 1mm (0.039 inches); vertical resolution maximum 1Å (under 6.55μm vertical range)
