Packaging testing equipment
Product Detail
Hydrofluoric Acid Vapor Etching Machine
Model: VPE150
Manufacturer: Switzerland Idonus sarl
Main Function: To enhance the safety and quality of the hydrofluoric acid etching process for silicon dioxide films
Technical Specifications:
1. Adhesion-free MEMS release
2. Structural thinning: Free release of structures on SOI substrates, etching rate adjustable from 0 to about 30μm/h, single-sided SiO2 etching (protecting the backside during the process)
