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MEMS Process
Lithography
Coating
Etching
Bonding
PI
PDMS
TSV
Mask
Ion Implantation
other
Equipment
Equipment
MEMS Product
Thermopile
Fused Silica
Glass Wafer
Process Nod-1.5um
Silicon On Silicon
Silicon On Sapphire
Process Nod-100nm
SiC
GaAs
Saphire (Al2O3)
GaN
InP
Ge
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Sub 2: PlutoSilica Co., Ltd -Silicon Wafer and Glass Wafer Manufactory-
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