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Magnetron Sputtering Tool
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Product Detail

Magnetron Sputtering Tool | Lesker PVD 200

Capabilities:

A versatile sputtering system specifically designed for depositing high-performance transparent conductive oxides (TCOs) such as ITO, IZO, and IGZO. Ideal for advanced display technology, touch panel manufacturing, and flexible electronics R&D.

Technical Specifications:

100 mm sputtering target capability
Heated rotating substrate stage (up to 8-inch wafers)
Comprehensive gas system (Ar, O₂, N₂)
Dual DC and RF power supplies
±5% film thickness uniformity

Process Advantages:

Precise composition control for oxide films
Excellent film uniformity through rotating stage
Flexible reactive sputtering capability
Reliable operation with industrial-grade components

Primary Applications:

Transparent electrode fabrication
Display and touch panel manufacturing
Flexible and printed electronics
Thin-film transistor development

Why Choose Our Sputtering Service?

We deliver high-performance ITO, IZO, and IGZO films with guaranteed ±5% uniformity for superior conductivity and transparency. Our specialized sputtering process ensures precise composition control and excellent film quality, enabling faster development cycles and higher yield for your display, touch panel, and flexible electronics projects. Partner with us to advance your transparent electrode and thin-film transistor applications with reliability and expertise.
Sub 1: PlutoChip Co., Ltd    -Discrete Devices and Integrated Circuits-    www.plutochip.com
Sub 2: PlutoSilica Co., Ltd   -Silicon Wafer and Glass Wafer Manufactory-
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