Precision Optical Coating Services | Leybold ARES 1100 System
Capabilities:
Our advanced optical coating service delivers exceptional thin film deposition for semiconductor applications. Utilizing the industry-proven Leybold ARES 1100 system, we specialize in high-precision optical coatings including SiO₂, Al₂O₃, Si, and Ta₂O₅ with guaranteed ≤±1% uniformity, meeting the most demanding requirements for integrated photonics and optical components in semiconductor devices.
Technical Specifications:
6 evaporation source crucibles for complex multilayer structures
Automatic rotating dome fixture ensuring uniform deposition
Electron beam evaporation with ion beam assistance
Dual monitoring: quartz crystal + optical thickness control
Within-wafer thickness uniformity: ≤±1%
Coating capacity: Up to 8-inch wafers and fragments
Process Advantages:
Superior film density and stability through ion-assisted deposition
Exceptional thickness uniformity across entire substrates
Reliable performance for sensitive optical applications
Optimized for seamless integration with semiconductor process flows
Enhanced adhesion and environmental stability
Primary Applications:
Semiconductor wafer-level optics and photonic devices
Advanced packaging with optical interconnects
MEMS and sensor optical coatings
AR/VR optical components for micro-displays
Research and development of novel optical devices
Why Choose Our Service:
Partner with us for optical coating solutions that integrate seamlessly with your semiconductor manufacturing process. We deliver the precision, reliability, and technical expertise needed for your most demanding optical applications, ensuring your devices perform to their optical specifications while accelerating your time to market through our proven coating expertise and dedicated technical support.
