Spectroscopic Ellipsometer | Sentech SER 850 DUV System
Capabilities:
The Sentech SER 850 DUV spectroscopic ellipsometer provides non-contact and non-destructive measurement of thin film thickness and optical constants. It is designed to deliver fast, precise characterization for demanding thin film analysis applications.
Technical Specifications:
Light Source: Halogen lamp + Xenon lamp
Key Function: 2D/3D-Mapping
Measurement Repeatability: ≤ 0.015 nm
Wavelength Range: 190–2500 nm
Single-Point Measurement Time: ≤ 25 seconds
In-Air Calibration Accuracy: Ψ ≤ 45° ± 0.03°, Δ ≤ 0° ± 0.07°
Process Advantages:
Non-destructive measurement preserves sample integrity
High repeatability ensures consistent and reliable data
Broad spectral range supports versatile material analysis
Fast measurement capability enhances operational throughput
2D/3D mapping enables visualization of film uniformity
Primary Applications:
Characterization of thin film thickness and optical constants in semiconductor, display, photovoltaic, and optical coating processes.
Why Choose Our Service?
Our expertise in spectroscopic ellipsometry measurement delivers accurate, non-destructive thin film characterization. With the Sentech SER 850 DUV system, we provide fast, repeatable results and detailed uniformity analysis—turning complex optical data into actionable insights for your R&D and production processes, all while preserving your valuable samples.
