Stylus Profiler | KLA P7 System
Capabilities:
Our advanced stylus profiler enables thickness measurement of opaque samples such as metal films in micro- and nanofabrication processes, delivering precise step height characterization for thin film metrology.
Technical Specifications:
Sample Stage Size: ≤ 156 mm
Single Scan Length: 150 mm
Stylus Force Control Range: 0.5–50 mg
Vertical Dynamic Scan Range: 0–327 μm
Step Height Repeatability: ≤ 4 Å (1σ) or ≤ 0.1%
Process Advantages:
Exceptional step height repeatability ensures reliable, consistent measurements
Broad vertical scan range accommodates various film thicknesses
Adjustable stylus force enables optimized contact for different materials
Long scan length captures extended surface profiles
Versatile sample stage supports multiple sample sizes
Dedicated capability for opaque film thickness measurement
Primary Applications:
Thickness measurement of opaque samples including metal films and other non-transparent coatings in micro- and nanofabrication, semiconductor manufacturing, and thin film process control.
Why Choose Our Service?
Partner with us for precision stylor profilometry solutions that deliver the accuracy, repeatability, and dynamic range your thin film thickness characterization demands. Using the KLA P7 system, we provide reliable step height measurements, long-scan profiling capabilities, and expert technical support—helping you maintain process control, verify film thickness, and ensure device performance with measurement solutions tailored to your specific opaque film and microstructures.
